JSON Schemas Turn ALD and ALE Literature into Structured Process Data

Summary

Atomic layer deposition (ALD) and atomic layer etching (ALE) are described inconsistently across experimental and simulation studies, making comparison and machine-actionable reuse difficult. This paper presents four domain-expert-reviewed JSON Schemas covering experimental and simulation processes for both areas. The schemas organize materials, process conditions, configurations, and measured or predicted results. The authors curated them with schema-miner and grounded them in the QUDT ontology using schema-miner pro. They compare the schemas’ scope, structure, and semantic grounding. The paper also demonstrates schema-guided extraction from the literature and publication of structured records through Open Research Knowledge Graph (ORKG) templates. The work targets a more consistent representation of ALD and ALE knowledge for reuse in materials-science workflows.